Micro LED refers to a technology that uses micron-scale LEDs as light-emitting pixel units and assembles them with driving modules to form a high-density display array. Compared with the current mainstream display technologies such as LCD and OLED, Micro LED has cross-generational advantages in terms of brightness, resolution, energy consumption, service life, response speed and thermal stability, and is an internationally recognized future display technology.
However, the industrialization of Micro LED still faces many challenges. First, it is difficult to match the driving requirements of high-density display units in small sizes. Secondly, the mass transfer technology popular in the industry is difficult to meet the development needs of high-resolution displays in terms of cost and yield. Especially for ultra-high-resolution applications such as AR/VR, not only the resolution is required to exceed 3000PPI, but also the display pixels need to have a faster response frequency.
Professor Zhang Rong of Xiamen Future Display Technology Research Institute cooperated with Nanjing University, Southeast University, Tianma Microelectronics Co., Ltd. and other units to propose a super-resolution Micro LED display technology solution based on MoS₂ thin film transistor driver circuit and monolithic integration.
The team developed a non-"massive transfer" low-temperature monolithic heterogeneous integration technology, using a nearly non-destructive large-scale two-dimensional semiconductor TFT manufacturing process to achieve a 3232 array of 1270 PPI high-brightness, high-resolution microdisplays, It can meet future cross-field applications such as micro display, vehicle display, and visible light communication.
Among them, compared with the traditional two-dimensional semiconductor device process, the new process developed by the team improves the performance of thin film transistors by more than 200 percent , reduces the difference by 67 percent , and the maximum driving current exceeds 200μA/μm, which is superior to IGZO, LTPS and other commercial materials. Show The huge application potential of two-dimensional semiconductor materials in the display driving industry is revealed.
Three-dimensional monolithic micro-LED displays driven by a matrix of atomically thin transistors
The research results are written in the article "Three-dimensional monolithic micro-LED display driven by atomically thin transistor matrix" and published in Nature Nanotechnology on September 9, 2021 (corresponding authors are Professor Wang Xinran, Professor Liu Bin, Professor Shi Yi and Professor Zhang Rong ).
This is the first time in the world that two emerging technologies of high-performance two-dimensional semiconductor TFT and Micro LED have been integrated, providing a new technical route for the future development of Micro LED display technology.